Testing Non-Conductive Samples

TESCAN’s MIRA3 LM is a PC-controlled FE SEM that provides customers flicker-free digital image with superior clarity and excellent optical properties. This instrument can be adapted for both low vacuum and high vacuum operations.

There are two types of MIRA3 configurations - MIRA3 LMU and MIRA3 LMH. The MIRA3 LMU is a variable-pressure FE SEM that offers all the advantages of the high vacuum type with comprehensive features for low vacuum operation, thus enabling the testing of non-conductive samples in their natural, uncoated state. The MIRA3 LMH has a large chamber with an extended motorized manipulator that operates at high vacuum and allows the testing of conductive samples with superior imaging quality.

Key Features

  • Automatic set up of the microscope
  • Standard formats of stored images
  • Advanced, user-friendly software for microscope control and image capturing using Windows™ system
  • Improved image archiving, processing and measurements
  • LM MIRA chamber provides improved specimen handling using a full five-axis motorized compucentric stage and flawless geometry for EBSD and EDX
  • First-class YAG scintillator-based detectors
  • Several interface ports with enhanced analytical geometry for EDX, WDX and EBSD and for linking many other detectors
  • Full operating vacuum can be attained quickly and easily with robust turbomolecular and dry fore vacuum pumps, electron gun pumping with an ion pump
  • Analysis of non-conductive samples in variable pressure mode versions, excellent results in the testing of magnetic samples
  • A broad range of optional detectors and accessories
  • Several options for chamber suspension-type guarantee efficient reduction of ambient vibrations in the lab


  • Leaf
  • Urchin
  • Diatoms
  • Coccosphaere
  • Foraminifera
  • Mouse tongue
  • Corundum inclusion
  • Highly mineralized water – sediment
  • Boreogadus saida
  • Rat intestine image snapper
  • Anus and tail of the nematode
  • Recrystallized quartz
  • PbI2 crystallization
  • HESC + fibroblasts
  • Streptococcus mutants

MIRA3 LM Application Images

Rat Intestine Image Snapper
Recrystallized quartz
STEM image of a polymer blend

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